大型真空等离子体处理机

• 

Nebula - Low Pressure Plasma Treatment

The Henniker Plasma 'NEBULA' range of low pressure plasma treatment systems are standalone systems with large capacity chambers for treating larger format parts, or more parts in a single batch. They are suited to both regular industrial usage and also for development of new processes and surface chemistry. NEBULA plasma treatment systems have a large HMI interface and are controlled via an industrial PLC system. They allow user level access ranging from simple operator, able to execute programs only, to full administrator, able to create users, edit and test new recipes. Due to their flexibility and robustness, they are chosen where reliability and flexibility are paramount.

Each NEBULA system can be configured with a variety of options including horizontal and vertical sample loading and also a rotary drum for treating many small parts or even powders. The user can specify up to three gas inlets as well as a precise monomer dosing inlet for plasma polymerisation work. In this way, simple cleaning and activation tasks can be extended to produce permanent polymeric coatings on many surfaces.

Henniker Plasma's NEBULA range of low pressure plasma treatment systems are perfect for cleaning, activation, and deposition onto a wide range of materials. Key applications include surface preparation to improve bond adhesion and plasma polymerisation to produce hydrophilic or hydrophobic coatings.

NEBULA low pressure Plasma systems:

• NEBULA-30: 30 litre plasma processing chamber (300x300mm x 375mm D)

• NEBULA-50: 50 litre plasma processing chamber (300x300mm x 600mm D)

• NEBULA-100: 100 litre plasma processing chamber (400x400mm x 600mm D)

• NEBULA-150: 150 litre plasma processing chamber (400x600mm x 600mm D)